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dc.contributor.authorHernández, M.J.
dc.contributor.authorCervera Goy, Manuel 
dc.contributor.authorPiqueras, Juan
dc.contributor.authorGonzález, M.A.
dc.contributor.authorAvella, M.
dc.contributor.authorCaño, T. del
dc.contributor.authorJiménez, J.
dc.date.accessioned2014-02-18T10:21:45Z
dc.date.available2013-10-17
dc.date.issued2007
dc.identifier.citationJournal of the Electrochemical Society 154.4 (2007): H325-H330
dc.identifier.issn1945-7111
dc.identifier.urihttp://hdl.handle.net/10486/13948
dc.descriptionThe Electrochemical Society, Inc. 2007. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journal of the Electrochemical Society Vol. 154 Issue 4 (2007): H325-H330
dc.format.mimetypeApplication/pdf
dc.language.isoeng
dc.publisherElectrochemical Society
dc.subjectCathodoluminescence
dc.subjectEllipsometry
dc.subjectSilicon Compounds
dc.titleHydrogen-free SiCN films obtained by electron cyclotron resonance plasma: a study of composition, optical and luminescent properties
dc.typearticle
dc.subject.ecienciaFísica
dc.type.reviewPeer reviewed
dc.relation.publisherversionhttp://dx.doi.org/10.1149/1.2472559
dc.identifier.doi10.1149/1.2472559
dc.rights.accessRightsopenAccessen
dc.authorUAMPiqueras Piqueras, Juan (259291)
dc.facultadUAMFacultad de Ciencias


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