UAM_Biblioteca

View Item 

Show simple item record

Elastic properties of B-C-N films grown by N2-reactive sputtering from boron carbide targets

dc.contributor.authorSalas, E.
dc.contributor.authorSánchez Marcos, Jorge 
dc.contributor.authorJiménez-Villacorta, Félix
dc.contributor.authorMuñoz-Martín, Angel
dc.contributor.authorPrieto, José Emilio
dc.contributor.authorJoco, V.
dc.contributor.authorPrieto, Carlos S.
dc.contributor.authorJiménez Riobóo, Rafael J.
dc.contributor.otherUAM. Departamento de Química Física Aplicadaes_ES
dc.date.accessioned2014-10-27T17:27:54Z
dc.date.available2014-10-27T17:27:54Z
dc.date.issued2013-12-07
dc.identifier.citationJournal of Applied Physics 114.21 (2013): 213508en_US
dc.identifier.issn0021-8979 (print)es_ES
dc.identifier.issn1089-7550 (online)es_ES
dc.identifier.urihttp://hdl.handle.net/10486/662287
dc.descriptionThe following article appeared in Journal of Applied Physics 114.21 (2013): 213508 and may be found at http://scitation.aip.org/content/aip/journal/jap/114/21/10.1063/1.4837655en_US
dc.description.abstractBoron-carbon-nitrogen films were grown by RF reactive sputtering from a B4C target and N2 as reactive gas. The films present phase segregation and are mechanically softer than boron carbide films (a factor of more than 2 in Young's modulus). This fact can turn out as an advantage in order to select buffer layers to better anchor boron carbide films on substrates eliminating thermally induced mechanical tensions.en_US
dc.description.sponsorshipThis work has been supported by Spanish MINECO under contracts MAT2009-08786 and MAT2012-37276- C03-01 as well as by the Madrid Regional Government though contract S2009/MAT-1756.en_US
dc.format.extent6 pag.es_ES
dc.format.mimetypeapplication/pdfen
dc.language.isoengen
dc.publisherAmerican Institute of Physics.en_US
dc.relation.ispartofJournal of Applied Physicsen_US
dc.rights© 2013 AIP Publishing LLC.en_US
dc.subject.otherBorones_ES
dc.subject.otherSurface acoustic waveses_ES
dc.subject.otherSputter depositiones_ES
dc.subject.otherThin filmses_ES
dc.subject.otherCarbideses_ES
dc.titleElastic properties of B-C-N films grown by N2-reactive sputtering from boron carbide targetses_ES
dc.typearticlees_ES
dc.subject.ecienciaQuímicaes_ES
dc.relation.publisherversionhttp://dx.doi.org/10.1063/1.4837655es_ES
dc.identifier.doi10.1063/1.4837655es_ES
dc.identifier.publicationfirstpage1es_ES
dc.identifier.publicationissue21es_ES
dc.identifier.publicationlastpage6es_ES
dc.identifier.publicationvolume114es_ES
dc.relation.projectIDComunidad de Madrid. S2009/MAT-1756/PHAMAes_ES
dc.type.versioninfo:eu-repo/semantics/publishedVersionen
dc.rights.accessRightsopenAccesses_ES
dc.authorUAMSánchez Marcos, Jorge (262556)
dc.facultadUAMFacultad de Ciencias
dc.institutoUAMCentro de Micro-Análisis de Materiales (CMAM)


Files in this item

Thumbnail
Name:
elastic_salas_jap_2013.pdf
Size:
6.496Mb
Format:
PDF

This item appears in the following Collection(s)

Show simple item record