Hydrogen-free SiCN films obtained by electron cyclotron resonance plasma: a study of composition, optical and luminescent properties
Editor
Electrochemical SocietyFecha de edición
2007Cita
10.1149/1.2472559
Journal of the Electrochemical Society 154.4 (2007): H325-H330
ISSN
1945-7111DOI
10.1149/1.2472559Versión del editor
http://dx.doi.org/10.1149/1.2472559Materias
Cathodoluminescence; Ellipsometry; Silicon Compounds; FísicaNota
The Electrochemical Society, Inc. 2007. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journal of the Electrochemical Society Vol. 154 Issue 4 (2007): H325-H330Lista de ficheros
Google Scholar:Hernández, M.J.
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Cervera Goy, Manuel
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Piqueras, Juan
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González, M.A.
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Avella, M.
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Caño, T. del
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Jiménez, J.
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