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Hydrogen-free SiCN films obtained by electron cyclotron resonance plasma: a study of composition, optical and luminescent properties

Author
Hernández, M.J.; Cervera Goy, Manueluntranslated; Piqueras, Juan; González, M.A.; Avella, M.; Caño, T. del; Jiménez, J.
Publisher
Electrochemical Society
Date
2007
Citation
10.1149/1.2472559
Journal of the Electrochemical Society 154.4 (2007): H325-H330
 
 
 
ISSN
1945-7111
DOI
10.1149/1.2472559
Editor's Version
http://dx.doi.org/10.1149/1.2472559
Subjects
Cathodoluminescence; Ellipsometry; Silicon Compounds; Física
URI
http://hdl.handle.net/10486/13948
Note
The Electrochemical Society, Inc. 2007. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journal of the Electrochemical Society Vol. 154 Issue 4 (2007): H325-H330
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Google™ Scholar:Hernández, M.J. - Cervera Goy, Manuel - Piqueras, Juan - González, M.A. - Avella, M. - Caño, T. del - Jiménez, J.

This item appears in the following Collection(s)

  • Producción científica en acceso abierto de la UAM [17777]

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All the documents from Biblos-e Archivo are protected by copyrights. Some rights reserved.
Universidad Autónoma de Madrid. Biblioteca
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