Hydrogen-free SiCN films obtained by electron cyclotron resonance plasma: a study of composition, optical and luminescent properties
10.1149/1.2472559Journal of the Electrochemical Society 154.4 (2007): H325-H330
SubjectsCathodoluminescence; Ellipsometry; Silicon Compounds; Física
NoteThe Electrochemical Society, Inc. 2007. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journal of the Electrochemical Society Vol. 154 Issue 4 (2007): H325-H330
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Google Scholar:Hernández, M.J. - Cervera Goy, Manuel - Piqueras, Juan - González, M.A. - Avella, M. - Caño, T. del - Jiménez, J.
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