Hydrogen-free SiCN films obtained by electron cyclotron resonance plasma: a study of composition, optical and luminescent properties
Publisher
Electrochemical SocietyDate
2007Citation
Journal of the Electrochemical Society 154.4 (2007): H325-H330ISSN
1945-7111DOI
10.1149/1.2472559Editor's Version
http://dx.doi.org/10.1149/1.2472559Subjects
Cathodoluminescence; Ellipsometry; Silicon Compounds; FísicaNote
The Electrochemical Society, Inc. 2007. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journal of the Electrochemical Society Vol. 154 Issue 4 (2007): H325-H330Files in this item
Save this on Delicious
Google™ Scholar:Hernández, M.J.
-
Cervera Goy, Manuel
-
Piqueras, Juan
-
González, M.A.
-
Avella, M.
-
Caño, T. del
-
Jiménez, J.
This item appears in the following Collection(s)
Related items
Showing items related by title, author, creator and subject.
-
Compound clusters in silicon dioxide obtained by N+, C+ and B+ high dose ion implantation: nature of the blue cathodoluminiscence emission and relationship with the embedded phases
Cervera Goy, Manuel
; Hernández, M.J.; Rodríguez, P.; Piqueras, Juan; Avella, M.; González, M.A.; Jiménez, J.
2004 -
Kinetics and compositional dependence on the microwave power and DiH4/N flow ratio of silicon nitride deposited by electron cyclotron resonance plasmas
Hernández, María Jesús; Garrido Salas, Javier; Martínez, J.; Piqueras, Juan
1994 -
Hydrogen incorporation and crystallization of nanocrystalline silicon deposited by electron cyclotron resonance plasmas
Holgado González-Guerrero, Susana; Martínez Rodríguez, Javier; Garrido Salas, Javier; Piqueras, Juan
1999-05-01