Hydrogen-free SiCN films obtained by electron cyclotron resonance plasma: a study of composition, optical and luminescent properties
Publisher
Electrochemical SocietyDate
2007Citation
Journal of the Electrochemical Society 154.4 (2007): H325-H330ISSN
1945-7111DOI
10.1149/1.2472559Editor's Version
http://dx.doi.org/10.1149/1.2472559Subjects
Cathodoluminescence; Ellipsometry; Silicon Compounds; FísicaNote
The Electrochemical Society, Inc. 2007. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journal of the Electrochemical Society Vol. 154 Issue 4 (2007): H325-H330Files in this item
Google™ Scholar:Hernández, M.J.
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Cervera Goy, Manuel
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Piqueras, Juan
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González, M.A.
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Avella, M.
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Caño, T. del
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Jiménez, J.
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