Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors
Publisher
Electrochemical SocietyDate
2000Citation
Journal of The Electrochemical Society 147.10 (2000): 3864-3867ISBN
1945-7111DOI
10.11491.1393987Editor's Version
http://dx.doi.org/10.11491.1393987Subjects
Física; ElectrónicaNote
© The Electrochemical Society, Inc. 2000. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journal of The Electrochemical Society. Barbadillo, L., Hernández, M. J., Cervera, M. and J. Piqueras. Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors. Journal of The Electrochemical Society 147.10 (2000): 3864-3867Files in this item
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190.5Kb
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Google™ Scholar:Barbadillo, L.
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Hernández, María Jesús
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Cervera Goy, Manuel
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Piqueras, Juan
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