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Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors | 54 |
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December 2022 | January 2023 | February 2023 | March 2023 | April 2023 | May 2023 | June 2023 | |
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Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors | 3 | 8 | 1 | 0 | 0 | 1 | 0 |
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65302_Amorphous_CNx_layers_from_neon_electron_cyclotron_resonance_plasmas_with_N2_and_CH4_as_precursors.pdf | 61 |
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