Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors

dc.contributor.author	Barbadillo, L.
dc.contributor.author	Hernández, María Jesús
dc.contributor.author	Cervera Goy, Manuel
dc.contributor.author	Piqueras, Juan
dc.date.available	2013-10-18
dc.date.issued	2000
dc.identifier.citation	Journal of The Electrochemical Society 147.10 (2000): 3864-3867
dc.identifier.isbn	1945-7111
dc.identifier.uri	http://hdl.handle.net/10486/13950	en
dc.description	© The Electrochemical Society, Inc. 2000. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journal of The Electrochemical Society. Barbadillo, L., Hernández, M. J., Cervera, M. and J. Piqueras. Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors. Journal of The Electrochemical Society 147.10 (2000): 3864-3867
dc.format.mimetype	Application/pdf
dc.language.iso	eng
dc.publisher	Electrochemical Society
dc.title	Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors
dc.type	article
dc.subject.eciencia	Física
dc.subject.eciencia	Electrónica
dc.type.review	Peer reviewed
dc.relation.publisherversion	http://dx.doi.org/10.11491.1393987
dc.identifier.doi	10.11491.1393987
dc.rights.accessRights	openAccess	en
dc.authorUAM	Hernández Muñoz, María Jesús (258432)
dc.authorUAM	Piqueras Piqueras, Juan (259291)
dc.facultadUAM	Facultad de Ciencias

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