Low temperature ECR-PECVD microcristallyne SiC growth by pulsed gas flows
Citation[Poster] 10th International Conference on Silicon Carbide and Related Materials (ICSCRM'03) held on 2003 in Lyon (France)
SubjectsFisica; Silicon Carbide; Thin film
NoteThis is an electronic version of the poster presented at the International conference on Silicon Carbide and related materials (ICSCRM'03) held in Lyon (France) on 2003
The article of the poster appears in Madar, Roland; Camassel, Jean and Blanquet Elisabeth (eds.) Materials Science Forum. Silicon Carbide and Related Materials. Volumes 457-460 (2004): 309-312
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