Shallow buried SiN x layers

Barbadillo. L.; Hernández, María Jesús; Cervera Goy, Manuel; Rodríguez, P.; Piqueras, Juan

UAM_Biblioteca

Author

Barbadillo. L.; Hernández, María Jesús; Cervera Goy, Manuel

; Rodríguez, P.; Piqueras, Juan

Publisher

American Institute of Physics

Date

2000

Citation

Journal of Applied Physics 87.11 (2000): 8201–8203

ISSN

1089-7550

Subjects

Física

URI

http://hdl.handle.net/10486/13965

Note

Copyright (2000) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Applied Physics 87.1 (2000): 8201-8203 and may be found at http://jap.aip.org/

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