Shallow buried SiN x layers
PublisherAmerican Institute of Physics
CitationJournal of Applied Physics 87.11 (2000): 8201–8203
NoteCopyright (2000) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Applied Physics 87.1 (2000): 8201-8203 and may be found at http://jap.aip.org/
Google Scholar:Barbadillo. L. - Hernández, María Jesús - Cervera Goy, Manuel - Rodríguez, P. - Piqueras, Juan
This item appears in the following Collection(s)
Showing items related by title, author, creator and subject.