Deep silicon amorphization induced by femtosecond laser pulses up to the mid-infrared
Entity
UAM. Departamento de Física AplicadaPublisher
WileyDate
2021-06-10Citation
10.1002/adom.202100400
Advanced Optical Materials 9.17 (2021): 2100400
ISSN
2195-1071DOI
10.1002/adom.202100400Project
info:eu-repo/grantAgreement/EC/FP7/284464/EU//LASERLAB-EUROPE; info:eu-repo/grantAgreement/EC/H2020/284464/EU//EXSEED; Gobierno de España. TEC2017-82464-REditor's Version
https://doi.org/10.1002/adom.202100400Subjects
Amorphization; Femtosecond Lasers; Phase Change; Silicon Photonics; Ablation; Spectroscopy; Dependence; FísicaRights
© 2021 The AuthorsFiles in this item
Google Scholar:García Lechuga, Mario
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Casquero, Noemí
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Wang, Andong
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Grojo, David
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Siegel, Jan
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