Process design for the manufacturing of soft X-ray gratings in single-crystal diamond by high-energy heavy-ion irradiation
Entidad
UAM. Departamento de Física AplicadaEditor
SpringerFecha de edición
2022-10-19Cita
10.1140/epjp/s13360-022-03358-3
European Physical Journal Plus 137.10 (2022): 1157
ISSN
2190-5444DOI
10.1140/epjp/s13360-022-03358-3Proyecto
Gobierno de España. PID2020-112770RB-C22; Comunidad de Madrid. S2018/EMT-4437/TECHNOFUSIÓN (III)-CMVersión del editor
https://doi.org/10.1140/epjp/s13360-022-03358-3Materias
Soft X-ray; Single-Crystal Diamond; Ion; Optical Gratings; lithography; irradiation; Free Electron Lasers; FísicaNota
The dataset that supports the findings of this study are archived in the Universidad Autónoma de Madrid data repository e‐cienciaDatos in https://doi.org/10.21950/ARZSJ1Derechos
© 2022, The Author(s)Resumen
This paper describes in detail a novel manufacturing process for optical gratings suitable for use in the UV and soft X-ray regimes in a single-crystal diamond substrate based on highly focused swift heavy-ion irradiation. This type of grating is extensively used in light source facilities such as synchrotrons or free electron lasers, with ever-increasing demands in terms of thermal loads, depending on beamline operational parameters and architecture. The process proposed in this paper may be a future alternative to current manufacturing techniques, providing the advantage of being applicable to single-crystal diamond substrates, with their unique properties in terms of heat conductivity and radiation hardness. The paper summarizes the physical principle used for the grating patterns produced by swift heavy-ion irradiation and provides full details for the manufacturing process for a specific grating configuration, inspired in one of the beamlines at the ALBA synchrotron light source, while stressing the most challenging points for a potential implementation. Preliminary proof-of-concept experimental results are presented, showing the practical implementation of the methodology proposed herein
Lista de ficheros
Google Scholar:García López, Gastón
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Martín Laso, Montserrat
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Ynsa Alcalá, María Dolores
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Torres Costa, Vicente
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Crespillo, M. L.
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Tardío, M.
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Olivares, J.
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Bosia, F.
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Peña-Rodríguez, O.
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Nicolas, J.
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Tallarida, Massimo
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